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为了解决微位移工作台的三维耦合问题,设计了一种驱动器固定的三维无耦合微位移工作台.本文介绍了它的结构和工作原理,通过有限元分析计算和样机实测验证,分别在X方向,X、Y方向和X、Y、Z方向施加载荷时,三维微位移工作台在X方向的位移不变,解决了三维空间运动耦合问题;分别在X、Y、Z方向施加不同载荷时,得到了工作台X、Y、Z方向的刚度,验证了工作台的位移、最大等效应力与载荷成正比.样机实测结果与有限元计算结果相吻合,工作台符合设计要求.
In order to solve the three-dimensional coupling problem of the micro-displacement workbench, a three-dimensional actuator-fixed uncoupling micro-displacement workbench is designed.This paper introduces its structure and working principle, and through the finite element analysis and calculation and prototype verification, respectively in the X direction X, Y, and Z directions, the displacement of the three-dimensional micro-displacement table in the X direction is unchanged, which solves the problem of the three-dimensional space motion coupling. When different loads are applied in the X, Y and Z directions respectively, The rigidity in the direction of X, Y and Z of the worktable is obtained, and the displacement of the worktable is verified, the maximum equivalent stress is proportional to the load.The experimental results of the prototype are in accordance with the results of finite element calculation and the workbench meets the design requirements.