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滤波器是信号传输系统中的重要组件.提出一种快速、高精度复制工艺方法,用于设计和制备WR-10波段矩形波导滤波器.采用多层匀胶单次紫外曝光工艺(硅片上匀SU-8胶),制备出的滤波器高度误差小于0.03%(3μm),陡直度误差小于1.1o.实验结果表明,用该方法制备毫米波滤波器技术可行,并取得了卓越的电磁性能(关于:插入损耗,回波损耗和带宽).最终测试结构可知,通带内的插入损耗测得结果小于0.5 dB,几乎可以忽略不计,在整个通带内回拨损耗大于10 dB.结果表明,这种快速制造技术是制备太赫兹射频器件的一种有效办法,这种新技术将成为推动太赫兹射频器件未来发展的主要动力.
Filter is an important component of signal transmission system.A fast and high-precision replication process is proposed to design and prepare WR-10 rectangular waveguides filters.Using multi-layer single-shot UV exposure technology Uniform SU-8 glue), the prepared filter height error is less than 0.03% (3μm), the steepness error is less than 1.1o. Experimental results show that this method is feasible millimeter-wave filter technology and achieved excellent electromagnetic Performance (About: Insertion Loss, Return Loss, and Bandwidth) The final test structure shows that the insertion loss in the pass band is less than 0.5 dB and almost negligible, giving greater than 10 dB return loss over the entire passband. It shows that this kind of rapid manufacturing technology is an effective method for preparing terahertz radiofrequency devices. This new technology will be the main driving force for the future development of terahertz radiofrequency devices.