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多弧离子镀中的等离子体是由辉光等离体和弧光等离子体迭加而成的。本文主要叙述了这种等离子体诊断方法和对用静电探针诊断这种等离子体的研究成果。这套等离子体诊断系统性能稳定，是目前国内外用于诊断多弧离子镀中等离子体的首套系统。用它诊断出的等离子体参数是首次对这种等离子体的数量描述。等离子体参数为；在真空度为２．６７Ｐａ～１０．６Ｐａ，放电电流为５０Ａ～８０Ａ，工件偏压为０～—２ｋＶ的条件下，等离子体密度在１．３×１０１５ｍ－３～２．３×１０１５ｍ－３范围内，电子温度在４３０至６６０ｅＶ范围内，空间电位相对于阳极为正，且在２伏至３伏范围内。
The plasma in multi-arc ion plating is composed of a glow plasma and an arc plasma. This paper describes the plasma diagnosis method and the research results of using electrostatic probe to diagnose this kind of plasma. This plasma diagnostic system has stable performance and is the first system in the world for diagnosing plasma in multi-arc ion plating. The plasma parameters diagnosed using it are the first description of the number of such plasmas. The plasma parameters are as follows: the plasma density is 1.3 × 10 15 m -3 ~ 2 at a vacuum of 2.67 Pa ~ 10.6 Pa, a discharge current of 50 A ~ 80 A, and a work bias of 0 ~ -2 kV. 3 × 1015m-3, the electron temperature is in the range of 430 to 660eV, the space potential is positive with respect to the anode, and is in the range of 2V to 3V.