A Novel Integrated PZT-Driven Micropump and Microvalve

• 作 者: Zhaoxin Geng Dafu Cui Haining
• 机 构: StateKeyLab.ofTransducerTech.
• 出 处: 稀有金属材料与工程
• 发表日期: 2006年A03期
• 基金项目: Acknowledgements： The authors greatly acknowledge the financial support from the National Science Foundation of China （Grant No~ 20299030, 60427001 and 60501020）.

<正>According to the'elastic buffer mechanism'and the'variable gap mechanism',a new device,which is both micropump and active microvalve actuated by PZT bimorph cantilever,was fabricated with polydimethyisiloxane (PDMS) and silicon ch