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利用水热法在180℃下制备ZrO_2-CuO复合纳米粒子(ZrCu),XRD测试表明随CuO含量增加,样品的结晶性变好。在ITO基片上旋涂制膜,通过GaIn微滴技术测试伏安特性,研究了复合比对ZrCu薄膜电学特性的影响。结果发现,ZrCu有良好可重复的双极阻变特性,随CuO含量增加,阈值电压降低,开关比降低。ZrCu低阻态符合欧姆特性,高阻态为空间电荷限制导电机制,阻变机理为氧空位细丝的形成与断裂。第一性原理计算结果与实验观察一致。
The ZrO_2-CuO composite nanoparticles (ZrCu) were prepared by hydrothermal method at 180 ℃. The XRD results showed that the crystallinity of the samples increased with the increase of CuO content. The films were spin-coated on ITO substrates and the volt-ampere properties were measured by GaIn droplet technique. The effects of composite ratio on the electrical properties of ZrCu films were investigated. The results show that ZrCu has a good repeatable bipolar resistance change characteristics. With the increase of CuO content, the threshold voltage decreases and the switching ratio decreases. ZrCu low resistance state is consistent with the ohmic property, the high resistance state is the space charge limited conduction mechanism, and the resistance change mechanism is the formation and the fracture of oxygen vacancy filaments. The first-principles calculations are consistent with the experimental observations.