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使用单粒子光学传感技术进行粒径分析,具有高分辨率和精确度的特点,将其与激光衍射等整体检测技术进行比较,应用实例,说明了单粒子光学传感技术对半导体CMP制程的必要性。
Using single-particle optical sensing technology for particle size analysis, with high resolution and accuracy of the characteristics, and its laser diffraction and other overall detection techniques are compared, the application examples illustrate the single-particle optical sensing technology for semiconductor CMP process necessity.