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KTJ—A型精密刻图机是八十年代的最新产品,是我国第一台声表面波及长光栅刻图的专用设备,它的出现必将为我国声表面波及长光栅等特种器件的研制和发展开辟广阔的前景。一、大幅面、高精度刻图机研制的必要性宇航事业的进步,促使微细工艺设备的发展,由于大规模和超大规模集成电路的出现,特别是新型的特种器件如声表面波、光集成、磁泡等器件的出现和发展,使得原有的微细工艺设备逐步被淘汰,随之而来的一整套以电子束、离子束、光子束为核心的新型微细加工技术
KTJ-A precision engraving machine is the latest product of the eighties, is China’s first special equipment for surface acoustic wave and long grating engraved map, its appearance is bound to China’s surface acoustic wave and grating and other special devices for the development and Development opens up broad prospects. First, the large-format, high-precision engraving machine necessary to promote the progress of aerospace industry, prompting the development of fine process equipment, due to the emergence of large-scale and VLSI, especially the new special devices such as SAW, optical integration , The emergence of bubble and other devices and development, making the original micro-processing equipment gradually be eliminated, followed by a set of electron beam, ion beam, photon beam as the core of the new micro-processing technology