论文部分内容阅读
多孔硅的形成和刻蚀技术是一项新型的表面微机械加工技术，我们以多孔硅为牺牲层，利用多孔硅的选择性生长机理，以及利用在高阻衬底上横向形成速率大于纵向形成速率的特点，得到了距衬底很深的微桥、微梁、微沟道等微结构，并设计研制了一种绝热式量热传感器。
Porous silicon formation and etching technology is a new surface micromachining technology, we use porous silicon sacrificial layer, the use of porous silicon selective growth mechanism, and the use of high-resistance substrate lateral formation rate is greater than the longitudinal formation Rate of micro-bridge, micro-beam, micro-channel and other micro-structures which are deep from the substrate. An adiabatic calorimeter was designed and developed.