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目前国内尚未见到有关 HF 渗透管的制备和 HF 渗透管配气的报告。我们研制的 HF 渗透管用聚四氟乙烯棒料做成。管帽和管体用螺纹连接,可以严格密封。当温度恒定时,单位时间内渗透出的 HF 量是恒定的。渗透率用重量法测定。温度、湿度、渗透管的材料、形状、大小以及渗透面的清洁程度都对渗透率有影响。配制浓度很低(ppb 或 ppt 级)的标准气,必须采用二次稀释法。
At present, there is no report about the preparation of HF permeation tubes and the distribution of HF permeate tubes. We developed HF permeable tube made of PTFE bar. Cap and tube with threaded connections, can be strictly sealed. When the temperature is constant, the amount of HF permeated per unit time is constant. Permeability was measured gravimetrically. The temperature, humidity, permeability of the material, shape, size and penetration of the permeable surface have an impact on permeability. Preparation of low concentrations (ppb or ppt level) of the standard gas, you must use the second dilution method.