Ceramic Films via Organometallic Complex as Single Source Precursor

• 作 者: Shyu Shin-Guang Wu Juan-Seng W
• 机 构: InstituteofChemistry,DepartmentofChemistry,DepartmentofChemistry
• 出 处: 合成化学
• 发表日期: 2004年z1期
• 关键词: MOCVD FES film SINGLE SOURCE Precursor. MOCVD FeS film Single Source Precurs

Fe2(CO)6(μ-S2) was used as a single source precursor in attempt to produce FeS film via MOCVD. Pyrolysis of Fe2(CO)6(μ-S2) at temperature below 500℃ produced Fe1-xS or Fe7S8 powder as indicated by its powder X-ray spectra. At 750 ℃, polycrystalline FeS po