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00614 High Frequence Parasitic Effects for On-Wafer Packaging of RF MEMS Switches/ A. Margomenos and L. P. B. Katehi (University of Michigan,USA)//2003 IEEE MTT-s Digest. —1931 介绍了RF MEMS开关的圆片级封装设计。所设计的圆片级封装件在频率高至40
00614 High Frequence Parasitic Effects for On-Wafer Packaging of RF MEMS Switches / A. Margomenos and LPB Katehi (University of Michigan, USA) // 2003 IEEE MTT-s Digest. -1931 The wafer level package design of RF MEMS switches . The design of the wafer level package at frequencies up to 40