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根据超精密隔振器的内部结构和隔振系统的布置形式,建立了超精密隔振系统的动力学模型,并在此基础上推导出理论频响函数。提出了隔振系统的频响测试方法,根据测试数据的特征值,计算获得了隔振系统动力学参数的初始值。采用参数调整法,使理论频响曲线不断逼进实验频响曲线,从而辨识出隔振系统的动力学参数。实验和误差分析结果验证了动力学模型的有效性和辨识参数的可信性。
According to the internal structure of the ultra-precision vibration isolator and the layout of the vibration isolation system, the dynamic model of the ultra-precision vibration isolation system is established. Based on this, the theoretical frequency response function is deduced. Based on the eigenvalues of the test data, the initial values of the dynamic parameters of the vibration isolation system are obtained. Using the parameter adjustment method, the theoretical frequency response curve is continuously pressed into the experimental frequency response curve to identify the dynamic parameters of the vibration isolation system. Experimental and error analysis results verify the validity of the dynamic model and the credibility of the identification parameters.