Effect of characteristics of plasma plume on the diamond-like film deposition

• 作 者: 姚东升 刘晶儒 俞昌旋 王丽戈 詹如娟
• 机 构: Department of Modem Physics, University of Science and Technology of China, Hefei 230026, China Nort
• 出 处: Science in China,Ser.A
• 发表日期: 2000年10期
• 关键词: diamond microhardness producing probably instead posed favor pulsed hardness inv

Pulsed KrF lasers of two different durations (30 ns, 500 fs) are used to deposit DLCfilms. By optical emission spectroscopy and ion probe, the composite species of laser generated plas-ma plume are identified, the average kinetic energy of ions, the plume flux and their variation with laserenergy density, and the distance from the target are investigated. The relation of the properties of de-posited films with the plasma characteristics is studied.

By optical emission spectroscopy and ion probe, the composite species of laser generated plas-ma plume are identified, the average kinetic energy of ions, the plume flux and their variation with laserenergy density, and the distance from the target are investigated. The relation of the properties of de-posited films with the plasma characteristics is studied.