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常用的CVD硬涂层有碳化钛、氮化钛和三氧化二铝。各种涂层的厚度一般可根据工具的切削和成形要求来选择,范围在5—9微米。需涂层处理的工具装入CVD反应装置(见图)后,在惰性气氛中加热。
Common CVD hard coatings are titanium carbide, titanium nitride and aluminum oxide. The thickness of the various coatings can generally be selected based on the cutting and forming requirements of the tool, in the range of 5-9 microns. The tools to be coated are loaded into a CVD reactor (see the figure) and heated in an inert atmosphere.