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用一种聚合物材料薄膜作为掩膜 ,通过在电化学腐蚀过程中控制腐蚀电流和时间 ,首次制备出了氧化多孔硅波导定向耦合器。实验中用波长为 980nm的激光作为信号光源 ,观测到了样品的耦合光信号。给出了耦合器耦合系数不确定的因素 ,同时也分析了多孔硅波导传输损耗形成的原因。
Using a polymeric film as a mask, an oxidized porous silicon waveguide directional coupler was first fabricated by controlling the corrosion current and time during electrochemical etching. In the experiment, a laser with a wavelength of 980 nm was used as the signal light source, and the coupled light signal of the sample was observed. The factors that make the coupling coefficient of the coupler uncertain are given, and the reasons for the formation of the transmission loss of the porous silicon waveguide are also analyzed.