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研制了一款皮秒激光剥蚀固体进样系统(ps LA)。该装置由激光器、激光束聚焦系统、样品池、气溶胶传输系统、观察系统、样品移动平台等几部分组成。激光器的输出波长可选,有1064,532,355和266 nm 4种,脉冲宽度30 ps,脉冲频率20 Hz。选用266 nm的波长进行性能表征,脉冲能量可达3.0 m J,剥蚀坑呈圆形,边缘陡峭,空间分辨率小于30μm,时间分辨率小于2 s,单位脉冲剥蚀量为20 nm。该装置与ICP-MS联用可实现固体样品的直接分析。
A picosecond laser ablation solid sampling system (ps LA) was developed. The device consists of laser, laser beam focusing system, sample cell, aerosol transmission system, observation system, sample moving platform and other parts. The output wavelength of the laser is optional, there are 4 kinds of 1064, 532, 355 and 266 nm, the pulse width is 30 ps, the pulse frequency is 20 Hz. When the wavelength of 266 nm was used for characterization, the energy of pulse was up to 3.0 mJ. The ablation pit was round and the edge was steep. The spatial resolution was less than 30μm and the time resolution was less than 2s. The unit erosion was 20 nm. The unit can be used with ICP-MS for direct analysis of solid samples.