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它是由天津市第四通用机械厂、天津市华北电器厂、天津市计量管理所共同设计试制成的,与标准电离真空计配合,可检定10-4乇~10-7乇之间的工作用电离真空计,并可作为超高真空测试系统。 系统采用两个油扩散泵串联,用北京化工研究院275#硅油。经烘烤,加液氮冷凝,平均16小时能达到≥5×10-10毛的极限真空。利用纯氮气经精密针间从中心喇叭嘴注入,形成亚稳态分子流层。使动态稳定性达到5分钟内变化≤1%。由于金属管道能精加工,与玻璃水银系统比较,能获得很好的对称性,消除了管道几何尺寸不一致所造成的压强差。 试验表明:检定误差的主要因素是标准电离真空计线路及电离计管的线性,以及对规管的除气功率和环境温度,而本系统带来的误差是很小的。
It is jointly designed and manufactured by Tianjin No.4 General Machinery Factory, Tianjin North China Electric Appliance Factory and Tianjin Metrology Administration. In cooperation with a standard ionization vacuum gauge, it can test 10-4 Torr to 10-7 Torr Work with ionization vacuum gauge, and can be used as ultra-high vacuum test system. The system uses two oil diffusion pumps in series, with Beijing Chemical Industry Research Institute 275 # silicone oil. After baking, liquid nitrogen condensation, an average of 16 hours to reach ≥ 5 × 10-10 hairs of ultimate vacuum. Pure nitrogen is injected into the center trumpet mouth through a precision needle to form a metastable molecular flow layer. Dynamic stability to change within 5 minutes ≤ 1%. As the metal pipe can be finished, compared with the glass mercury system, can get a good symmetry, eliminating the inconsistency caused by pipe geometry pressure difference. The test shows that the main factors of calibration error are the linearity of standard ionization gauge and ionization gauge tube, and the regulated degassing power and ambient temperature. The error brought by this system is very small.