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采用真空蒸镀方法 ,利用液体衬底在沉积过程中的扩散 ,形成了沉积在玻璃表面的楔形铝薄膜 ,并研究了它的结构和I V特性 .实验表明 ,楔形铝薄膜的斜率仅 10 - 6 — 10 - 7,具有与一般非平整薄膜不同的I V特性 ,其非平整效应不能用普通的非平整薄膜的RRN理论模型来解释 .
The wedge - shaped aluminum thin film deposited on the glass surface was formed by vacuum deposition and the diffusion of the liquid substrate during deposition was also studied.The structure and IV characteristics of the wedge - shaped aluminum thin film were studied.The experimental results show that the slope of the wedge aluminum thin film is only 10 - 6 The non - flattening effect can not be explained by the RRN theoretical model of normal non - flat film.