论文部分内容阅读
本文基于微压差装置整体漏率的传统测试方法中误差产生原因,选择刚性容器替代大气作为压强测量基准,通过温度计精确测量了微压差装置和基准容器的温度,并采用温度补偿修正泄漏差压以获得整体漏率。通过刚性容器膨胀实验对该方法进行验证,以密闭氧气枕为缩比模型,测量了500Pa微正压下的漏率,结果显示该方法可以获得良好的测量重复性,相对误差低于15%,为微压差装置整体漏率的精确测量奠定了技术基础。
Based on the reason of the error in the traditional testing method of the whole leakage rate of the micro-pressure differential device, a rigid container is chosen as the reference of the pressure measurement instead of the atmosphere. The temperature of the micro-pressure difference device and the reference container is accurately measured by the thermometer, and the temperature difference is used to correct the leakage difference Pressure to get the overall leak rate. The method was verified by rigid container expansion experiment. The leak rate of 500Pa under positive pressure was measured by closed oxygen pillow. The results show that this method can obtain good repeatability of measurement, the relative error is less than 15% It has laid the technical foundation for the accurate measurement of the overall leakage rate of the micro-pressure differential device.