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华中理工大学光学工程系采用RF溅射法成功地制出高温超导薄膜。这种薄膜的衬底力氧化锆,靶材为Y-Ba-Cu-O,薄膜厚度为1μm左右,转变温度为
Huazhong University of Science Department of Optical Engineering using RF sputtering successfully produced high temperature superconducting thin film. This kind of thin film substrate force zirconia, the target is Y-Ba-Cu-O, the film thickness is about 1μm, the transition temperature is