论文部分内容阅读
随着外延剥离技术和转印技术的发展,柔性无机半导体集成器件引起人们的广泛关注.柔性无机发光二级管(LED)的研制是高精度转印技术和应用于生物传感的柔性混合集成技术的迫切需求.薄膜发光二级管(TF-LEDs)的电流扩展和热管理是研制TF-LEDs性能的关键.该文采用光刻胶微支撑结构,制备了两种结构的TF-LEDs,并将其转印到柔性衬底聚二甲基硅氧烷(PDMS)上,测试TF-LEDs的电学特性.采用二维有限元模拟仿真,综合考虑复合机制、晶格温度等对LEDs电学特性的影响,分析了条形电极结构TF-LEDs和环形电极结构TF-LEDs的电流扩展问题,说明环形电极结构TF-LEDs电流分布均匀性好,自发热效应较小;在柔性衬底上,可以在相对较大的功率下连续工作而不会因为温度过高而造成器件损坏.
With the development of epitaxial lift-off technology and transfer technology, the flexible inorganic semiconductor integrated device has aroused widespread concern.Development of flexible inorganic light-emitting diode (LED) is a high-precision transfer technology and flexible hybrid integrated in biosensing (TF-LEDs) is the key to the development of TF-LEDs performance.This paper uses the photoresist micro-support structure to prepare two kinds of TF-LEDs, (PDMS), and the electrical properties of the TF-LEDs were tested.The two-dimensional finite element simulation, taking into account the complex mechanism, lattice temperature and other electrical properties of the LEDs The current spreading of the TF-LEDs and the TF-LEDs is analyzed. The results show that the current distribution of the TF-LEDs in the ring electrode is good and the self-heating effect is small. On the flexible substrate, Continuous operation at relatively high power without damage to the device due to overheating.