利用光纤干涉法测量光学粗糙面的形状

• 作 者: 高晓萍
• 出 处: 光机电信息
• 发表日期: 2004年期
• 关键词: 粗糙面 激光光源 光纤端面 折射率分布 相位调制 干涉法 干涉仪 测量面 斐索 透镜组

本文叙述利用由光纤和折射率分布型透镜组成的探测器测量反射表面形状的装置.用光纤端面的反射和测量面的反射构成斐索干涉仪,通过半导体激光光源的电流调制进行相位调制.因为图中用D_1所探测的光强度随激光的光强、测量面的光程差、干涉的能见度而变,所以由相位所得到的结果来决定

This article describes a device that uses a detector consisting of an optical fiber and a refractive index profile lens to measure the shape of the reflecting surface. The Fizeau interferometer is formed by the reflection of the end face of the fiber and the reflection of the measuring surface, and the phase modulation is performed by the current modulation of the semiconductor laser light source The light intensity detected by D_1 in the figure is dependent on the intensity of the laser light, the optical path difference of the measurement surface, and the visibility of the interference, so the result of the phase determination