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1.前言众所周知,低温环境对硅分散膜微传感器的偏压和压力灵敏度都有不利影响。为使压力传感器和相应的电信号调节电路能用于-173℃至+80℃的场合,有必要模拟工作在-173℃至
1. Preface As we all know, low temperature environment silicon dispersion film micro-sensor bias and pressure sensitivity have a negative impact. In order for the pressure sensor and the corresponding electrical signal conditioning circuit to be used at -173 ° C to + 80 ° C, it is necessary to simulate the operation at -173 ° C