论文部分内容阅读
电镜光栅是一种刻制特殊槽形,以利于提高显微图象的反差和立体感,并且刻槽呈正交型的电镜专用光栅。其复膜样品是校准电镜放大倍数时最常用的标准样品之一。然而,在以往的实际使用中,很少、甚至不考虑该样品的自身精度。往往忽略了在制备光栅复膜样品时的收缩因素,正是这个因素,使复膜上的周期值要比原刻光栅上小百分之几。显然,如果用此样品所校准的电镜放大倍数,仅来自样品所产生的误差就要增加百分之几了。这是导致电镜标称放大倍数与实际放六倍数之间存在较大误差的一个重要原因。
Electron microscope grating is a special groove shape, in order to facilitate the improvement of contrast and three-dimensional microscopic image, and the groove was orthogonal electron microscope-specific grating. The Fumo sample is one of the most commonly used standard samples for calibrating electron microscope magnification. However, in the past actual use, little or no consideration is given to the self-precision of the sample. Often neglected in the preparation of grating compound film shrinkage factor, it is precisely this factor, so that the complex film on the periodic value than the original engraved grating a few percent. Obviously, if the electron microscope magnification calibrated with this sample, only the error from the sample is increased by a few percent. This is an important reason that there is a large error between the nominal magnification of the electron microscope and the actual magnification of six.