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用四极质谱计对一台全金属超高真空系统进行了残气分析.发现钛钽二极式溅射离子泵能有效地抽除惰性气体,但泵停止工作后会大量解吸惰性气体及甲烷;BA 规管电子轰击去气时系统内有大量 CO、CO_2和CH_4产生,同时有 O_2、N_2、H_2、Ar、Ne、He 等气体出现;德制 TVP—501型涡轮分子泵启动时可出现以机械泵油为主的严重返流,高温烘烤能有效地消除油污染.在10~(-9)帕下分析系统中的主要残余气体是苯、CO 和 CO_2.最后提供了一些典型实验结果,并且对其中某些现象进行了分析和讨论.
A quadrupole mass spectrometer was used to analyze the residual gas of an all-metal ultra-high vacuum system. It was found that the titanium-tantalum diode sputtering pump can effectively purge the inert gas, but the pump would desorb the inert gas and methane ; BA regulates the generation of large quantities of CO, CO_2 and CH_4 in the system when the electron bombardment goes to the gas, and at the same time O_2, N_2, H_2, Ar, Ne, He and other gases appear; German TVP-501 Turbomolecular Pump The main regurgitation, which is dominated by mechanical pump oil, can be effectively eliminated by high temperature baking. The main residual gases in the analytical system under 10-9 Pa are benzene, CO and CO 2. Finally, some typical experiments The results, and some of the phenomena were analyzed and discussed.