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使用2.45GHz,TE_(10)模式的微波在由Nd-Fe-B永久磁钢形成的多极磁场中产生了ECRM等离子体。利用这种等离子体通过反应溅射法在室温基片上制备了具有C轴取向的ZnO薄膜。等离子体的轴向分布依赖于等离子体腔室中的磁场形态。XRD,TEM和SEM的分析表明,淀积的ZnO薄膜的晶粒尺寸为nm量级,致密而又平滑,具有良好的C轴取向度。
Using microwaves in the 2.45 GHz, TE_ (10) mode produces ECRM plasma in multipole magnetic fields formed from Nd-Fe-B permanent magnets. A ZnO thin film having a C-axis orientation was prepared on this substrate at room temperature by reactive sputtering using this plasma. The axial distribution of the plasma depends on the shape of the magnetic field in the plasma chamber. The results of XRD, TEM and SEM show that the grain size of deposited ZnO films is nm, dense and smooth, and has good C-axis orientation.