【摘 要】
：
Theoretical analysis and experimental study on the thickness distribution of Ta2O5 film evaporated on the inner-face of a hemispherical substrate are demonstrated.It is derived that the value of n/R and L/R influence the film thickness dis-tribution(where
【机 构】
：
Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanz
论文部分内容阅读
Theoretical analysis and experimental study on the thickness distribution of Ta2O5 film evaporated on the inner-face of a hemispherical substrate are demonstrated.It is derived that the value of n/R and L/R influence the film thickness dis-tribution(where R is the radius of the hemisphere,n and L are the horizontal distance and vertical height between the evaporation source and the center of the hemisphere,respectively).The whole hemispherical substrate can be coated when n≤L+R,otherwise there is a“blind area”on the substrate when the substrate is self-rotating.A hemispherical composite substrate with a radius of 200 mm is coated with Ta2O5 protective film under a certain configuration,the thickness of Ta2O5 film at the edge is 0.372 times the film at the vertex which shows that the evaporation characteris-tics of Ta2O5 tend to be a point source.
其他文献
We proposed a graphene based active plasmonic device by the introduction of graphene-MoS2 heterostructures.The device was composed of a monolayer MoS2 layer between the silicon substrate and periodically arranged graphene nanoribbon arrays.The finite-diff
0 引言rn增材制造技术是一种变革性的数字化制造技术,自出现以来对制造业产生了重要影响,被普遍认为是引领第三次工业革命的关键技术,是现代制造史上的又一个里程碑.其原理是利用激光或电子束等手段,根据零件的三维模型,在计算机自动控制下通过材料逐层添加堆积而快速精确制成零件.增材制造技术在成本、效率和质量方面优势突出,展现出与机械加工和铸造等传统减材工艺抗衡、逐渐成为主流制造技术的巨大潜力.
The cholesterol solution concentration sensing characteristics based on tilted fiber Bragg grating(TFBG)are investi-gated by means of theoretical analysis and experiments.We prepare two groups of cholesterol solutions with the same concentration range and
本大板面散热器真空钎焊工艺参数复杂、焊接难度大、产品合格率较低,鉴于此钎焊接头的检测是生产过程中必不可少的一个环节,无损检测在不破坏钎焊接头或在不影响钎焊接头使用的前提下进行的焊接缺陷检验是验证产品焊接质量的重要手段.本文旨在针对大板面散热器钎焊质量有效控制与评估,对其无损检测方法进行探究.
生物质活性炭是符合绿色发展理念的碳中性材料,其大力发展和推广应用有助于实现国家“双碳”目标.为促进生物质活性炭产业发展,综述了炭化、活化、改性和再生等生产工艺,讨论了其在吸附净化、催化反应和能源储存等方面的应用,从拓展原料、优化工艺、开发新装备、研制新产品和开展“碳中和”战略规划及标准化研究等方面提出了进一步加快生物质活性炭产业发展的建议.
以南岳衡山为例,构建宗庙文化景区生态旅游可持续发展评价指标体系,运用层次分析法确定指标权重,结合专家评分为指标赋分,计算其生态旅游可持续发展评价综合得分.研究结果显示,南岳衡山处于生态旅游可持续发展良好阶段,具体而言,旅游区历史底蕴、旅游经济水平、生态环境与宗庙文化的协调度等情况表现良好,而旅游从业人员受教育程度、传统文化的宣传教育程度以及游客对文化价值的认同度则是阻碍南岳衡山生态旅游可持续发展的重要因素.因此,南岳衡山应提高旅游从业人员素质,强化社会服务能力;深挖文化内核,加强传统文化的宣传;创新旅游模
In this paper,we present a phase multiplication algorithm(PMA)to obtain scalable fringe precision in laser self-mixing interferometer under a weak feedback regime.Merely by applying the double angle formula on the self-mixing signal multiple times,the con
In order to improve the spectrum efficiency of the high-order polar coded modulation systems,the polar code is used as the component code of the bit-interleave coded modulation(BICM)system,a novel bit mapping scheme is proposed considering of the channel
结合紫色象草在南昌地区高水平施用猪粪肥栽培实际,介绍了其品种特性以及在高水平施用猪粪肥时的地块选择、移栽、田间管理、收获与利用操作技术要点.
本文旨在研究猪高致病性蓝耳GDr180株弱毒活疫苗对猪瘟免疫抗体效果的影响,为此,同时进行了高致病性蓝耳GDr180株弱毒活疫苗接种和野毒感染两个影响因素的试验.在试验1中,试验动物采用经聚合酶链式反应(PCR)核酸检测和酶联免疫吸附试验(ELISA)抗体检测确定为猪蓝耳病阴性的仔猪;试验组仔猪分别在14日龄时注射1mL高致病性蓝耳GDr180株弱毒活疫苗和21日龄时注射2头份猪瘟兔化弱毒疫苗,对照组分别在相对应日龄时注射1mL生理盐水和2头份猪瘟兔化弱毒疫苗.在试验2中,试验组动物采用经PCR核酸检测和