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在三种条件下采用电子束蒸发方法制备钼氧化物薄膜。从烧结靶淀积出的薄膜为多晶状态；从粉末压结靶淀积出非晶态薄膜。在LiClO4－PC电解质中测试各种薄膜的循环伏安特性和阶跃电压下的电流响应和光透射响应，表明2．5×10－2Pa氧分压下压结靶淀积的薄膜具有较好的电色性能；XPS分析该种薄膜为MoO3组份，Li＋注入使Mo3d和O1s的结合能降低。
Molybdenum oxide films were prepared by electron beam evaporation under three conditions. The film deposited from the sintering target is in a polycrystalline state; an amorphous film is deposited from the powder compacting target. The cyclic voltammetry and step current response and light transmission response of various thin films were tested in LiClO4-PC electrolyte, indicating that the film deposited at 2.5 × 10-2Pa partial pressure had better Electrochromic properties; XPS analysis of the film is MoO3 component, Li + injection to Mo3d and O1s binding energy can be reduced.