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本文概述了声显微镜发展动态,以清华大学近期研制的THSAM-7型声显微镜为例,说明了声显微镜的结构。它包括声路、电路、机械和微机四个主要部件。文中讨论了声显微镜的三种工作状态和成象原理;介绍了一些应用实例,说明了它具有的独特功能。它对结合面状况研究,不透光及不反光体的表层和内部结构检测特别有效。最后介绍了与声显微镜成象有关的一些图象处理问题。
This article summarizes the development of acoustic microscope. Taking the THSAM-7 type acoustic microscope recently developed by Tsinghua University as an example, the structure of the acoustic microscope is illustrated. It includes sound path, circuit, machinery and computer four main components. The paper discusses three working states and imaging principles of acoustical microscope. Some application examples are introduced to illustrate its unique functions. It is particularly effective in the study of the condition of the bond surface, the inspection of the surface and interior structures of opaque and non-reflective objects. Finally, some image processing problems related to acoustic microscopy are introduced.