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本文介绍了一种适宜于电子显微镜用的高亮度长寿命的新阴极Y_2O_3-1r。测量其热发射特性:介于Th-W阴极与LaB_6阴极之间。测量其电子枪特性:束流稳定度可达7×10~(-3),亮度可达3×10~5A/cm~2·sr,交叉斑直径约为20μ。根据对其物理化学性能的分析,阐明了寿命长的根据。本文并介绍这种阴极的制造工艺及在透射式电子显微镜和扫描电子显微镜上应用的情况。最后讨论了这种阴极在电子显微镜上应用的前景。
In this paper, a new cathode Y_2O_3-1r with high brightness and long lifetime suitable for electron microscopy is introduced. The thermal emission characteristics were measured: between Th-W cathode and LaB_6 cathode. The characteristics of the electron gun were measured. The beam stability was up to 7 × 10 -3, the brightness was up to 3 × 10 -5 A / cm 2 sr, and the diameter of cross spot was about 20 μm. According to the analysis of its physical and chemical properties, clarify the basis of long life. This article also describes the manufacturing process for this cathode and its application to transmission electron microscopy and scanning electron microscopy. Finally, the prospect of using this cathode in electron microscopy is discussed.