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形状记忆合金通过热传导而实现其形状记忆效应，块状材料有响应性迟缓的缺点，但是随着合金材料厚度的减薄由于冷却效率提高，故可大大改善其响应性。Ｔｉ－Ｎｉ形状记忆合金薄膜可望成为产生应力最强而且位移最大的微型致动器用材料。溅射薄膜在实现大致完全的形状记忆效应条
The shape memory effect of the shape memory alloy is realized by heat conduction, and the bulk material has the disadvantage of slow response. However, the response of the shape memory alloy is greatly improved as the thickness of the alloy material is reduced due to the improvement of the cooling efficiency. Ti-Ni shape memory alloy thin film is expected to become the most stress and displacement of the largest micro-actuator material. Sputtering films achieve substantially complete shape memory effect