论文部分内容阅读
一种基于拍波干涉原理的无导轨大尺寸测量系统已研制成功。它以双纵模热稳频 He-Ne 激光为光源,其两纵模生成于同一振腔内具有天然同轴的优势,在整个测量范围内不会发生光束分离。两纵模频差约790MHz,拍波波长约380 mm。其稳定度(即拍波波长稳定度)与激光频率稳定度相同,在无空调并有冷热气流吹拂时可保证不低于10~(-7)。两纵模频差以拍波节点为对准标志,采用自适应滤波和小波锐化器有效滤除噪声,从而提高了节点检测的测量精度。测量起点和终点到最近节点的距离由同一光源分出来的双频干涉仪精确测定,分辨力为0.08μm。经实验验证:系统的测量范围大于20 m,测量不确定度优于30μm/10 m。
A non-guideway large-size measurement system based on the principle of beat wave interference has been successfully developed. Its dual-longitudinal mode He-Ne laser as the light source, the two longitudinal modes generated in the same coaxial with the natural coaxial advantages in the entire measurement range will not occur beam separation. The difference between the two longitudinal modes is about 790 MHz and the beat wavelength is about 380 mm. Its stability (ie beat wavelength stability) and laser frequency stability of the same, without air conditioning and hot and cold air flow can be guaranteed when blowing no less than 10 ~ (-7). The frequency difference between the two longitudinal modes takes the beat node as the alignment mark, and the noise is effectively filtered by adaptive filtering and wavelet sharpening to improve the measurement accuracy of the node detection. The distance between the starting point and the ending point of the measurement to the nearest node is accurately measured by the dual-frequency interferometer split by the same light source with a resolution of 0.08 μm. The experimental verification: the system measurement range is greater than 20 m, the measurement uncertainty is better than 30μm / 10m.