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在锗衬底上用二极管离子镀的硫化锌增透膜虽具有良好的抗湿性,但其抗磨性却不理想。这可归因于堆积甚松的强柱状结构。为了改善抗磨性,有必要加一第三电极,令其在较低压力下放电并在淀积过程中加热衬底。
Zinc sulphide antireflection coatings on diode germanium substrates have good moisture resistance, but their abrasion resistance is not ideal. This can be attributed to the strong pillared pile structure. In order to improve abrasion resistance, it is necessary to add a third electrode to discharge it at a lower pressure and to heat the substrate during the deposition.