论文部分内容阅读
自动组合装置(cluster tools)是半导体制造行业中的瓶颈设备.通过研究该装置以提高其生产效率也成为了半导体生产厂商所关心的问题.Petri网络能够处理并发事务,对并发系统具有强大的建模,分析,仿真,综合和控制能力,已经成功的应用于很多领域.CPN tools是一个强大的有色Petri网建模,仿真,分析的工具.该文尝试利用该工具对相对复杂的双臂自动组合装置进行有色Petri网的建模和仿真,并对该装置的实时调度逻辑进行分析.“,”Cluster tools (CT) are the critical, and usually, the bottleneck equipment. Quantized the performance of the cluster tools is significant to the analysis of production efficiency and cost prediction. Petri nets are a promising graphical and mathematical modeling tool applicable to many systems for describing and studying information systems that are characterized as being parallel, concurrent, asynchronous, distributed, nondeterministic, and/or stochastic. In this paper, we proposed a detailed process to build a Timed Color Petri net (TCPN) model for dual-robot-arm-dual-chamber cluster tools using CPN Tools developed by University of Aarhus.