Fabrication of micro-scale gratings for moire method with a femtosecond laser

• 作 者: GaoshengYan Jianguo Zhu Yanlon
• 机 构: FacultyofCivilEngineeringandMechanics,SchoolofCivilEngineeringandArchitecture
• 出 处: 力学快报：英文版
• 发表日期: 2016年4期
• 关键词: 光栅制作 飞秒激光 微尺度 扫描电子显微镜 莫尔法 曝光系统 云纹法 石英玻璃 Micro-scale grating Femtosecond laser Mo
• 基金项目: The authors are grateful for financial support from the National Natural Science Foundation of China （11372118 and 11302082）.

Fabrication of micro gratings using a femtosecond laser exposure system is experimentally investigated for the electron moiré method. Micro holes and lines are firstly etched for parameter study. Grating profile is theoretically optimized to form hig