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据《日经微器件》2006年第10期报道,日立金属在2006年8月开发出了世界最小尺寸的3轴加速度MEMS传感器。该MEMS传感器的外形尺寸仅为2.9mm×2.9mm×0.92mm,体积为7.7mm3。这是一个压敏阻抗的MEMS传感器。采用10引脚、LOC(Lead on Chip)封装形式。并在2006年年底批生产。3V工作时
According to “Nikkei Micro Devices,” No. 10 of 2006 reported that Hitachi Metals in August 2006 developed the world’s smallest 3-axis acceleration MEMS sensor. The MEMS sensor’s overall dimensions are only 2.9mm × 2.9mm × 0.92mm and its volume is 7.7mm3. This is a piezoresistor MEMS sensor. 10-pin, LOC (Lead on Chip) package. And in the end of 2006 batch production. 3V when working