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我们用原位直流磁控溅射的方法,在(100)SrTiO_3,(110)SrTiO_3,(100)LaAlO_3和(100)Zr(Y)O_2衬底上制备了高质量外延生长的GdBa_2Cu_3O_(7-s)高温超导薄膜,重复性非常好.在这四种衬底上生长的超导薄膜最高零电阻转变温度 Tco分别为 93.2、93.1、92.6和 92.5K,77K零场下的临界电流密度分别为 3.0 ×10~6,3 × 10~5,3.6 ×10~6和 1.4 × 10~6A/cm~2.我们用扫描电镜(SEM),透射电镜(TEM),反射高能电子衍射(RHEED)和不同几何结构的X射线衍射研究了薄膜的结构,这些研究结果证明薄膜系外延生长的.
In this paper, high-quality epitaxial growth of GdBa_2Cu 3 O 7 (7-O) thin films on (100) SrTiO 3, (110) SrTiO 3, (100) LaAlO 3 and (100) Zr (Y) O 2 substrates were prepared by in-situ DC magnetron sputtering. s) high-temperature superconducting films, the repeatability is very good.The highest zero-resistance transition temperature Tco of the superconducting films grown on these four kinds of substrates are respectively 93.2, 93.1, 92.6 and 92.5K, the critical current densities at 77K zero field 3.0 × 10 ~ 6, 3 × 10 ~ 5, 3.6 × 10 ~ 6 and 1.4 × 10 ~ 6A / cm ~ 2, respectively.We used SEM, TEM, RHEED, The structure of the films was investigated by X - ray diffraction and different geometries. These results demonstrate that the films are epitaxially grown.