论文部分内容阅读
目标因子分析法（ＴＦＡ）是一种对多元系统进行统计分析的计算数学方法。结合这种方法对Ｔｉ／Ａｌ多层金属薄膜的俄歇电子谱（ＡＥＳ）深度剖析结果进行了仔细的分析，获得了Ｔｉ、Ａｌ、Ｏ、Ｓｉ各元素的化合状态的深度分布情况，并与Ｘ射线光电子谱（ＸＰＳ）分析结果相一致．
Target Factor Analysis (TFA) is a computational mathematics method for statistical analysis of multivariate systems. Combined with this method, the depth analysis results of Auger electron spectroscopy (AES) analysis of Ti / Al multilayered metal thin films were carefully analyzed and the depth distributions of the chemical states of Ti, Al, O and Si were obtained. X-ray photoelectron spectroscopy (XPS) analysis of the results.