论文部分内容阅读
Accurate determination of thin film optical constant has great significance in various technical fields[1].Though the measurement precision of ellipsometer may be high enough,it is still a delicate task to inverse accurate optical constant through complicated data processing[2],especially faced with self-made models and new materials.Aiming at existing local optimization and processingspeed problems of commonly used genetic algorithm and simulated annealing algorithm[3][4],this research introduces a kind of improved ant colony algorithm[5] to conduct optical constant inversion.