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5. Frequency response of a micromachined doubly-clamped vibrating beam for the measurement of liquid pr

Frequency response of a micromachined doubly-clamped vibrating beam for the measurement of liquid pr

来源 :2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE | 被引量 : 0次 | 上传用户：ADAM129XU

【作 者】

：

Christian Rieasch Erwin K.Reichel Franz Keplinger Bernhard Jakoby 

【机 构】

：

Vienna University of Technology,Institute of Sensor and Actuator Systems, Vienna, Austria

【出 处】

：

2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE

【发表日期】

：

2008年1期

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