【摘 要】
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This paper studied the microstructure and properties of TiN films were deposited by multi-arc ion plating with different substrate temperature.The surface m
【机 构】
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School of Materials Science and Engineering, Guilin University of Electronic Technology, Guilin 5410
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This paper studied the microstructure and properties of TiN films were deposited by multi-arc ion plating with different substrate temperature.The surface morphology of TiN films was investigated by SEM, the phase structure was investigated by XRD, the adhesion strength of the films was measured by automatic scratch tester.The results show that: when the substrate temperature is low, the surface of films is loose, with the substrate temperature increases, the surface of films become compact, the crystal grain begin grow up, the TiN film is facial central cubic structure, and exhibits preferential orientation of the film is (111) plane under the different substrate temperature.when the substrate temperature increases, the adhesion strength of the films increased, the maximum adhesion strength of the films is 53N as the substrate temperature is 300℃.
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