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氮化铌系超导薄膜和器件及其在超导电子学中的应用
【机 构】
：
中国科学院上海微系统与信息技术研究所,上海 200050
【出 处】
：
第十三届全国超导薄膜和超导电子器件学术研讨会
【发表日期】
：
2014年期
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