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5. Design of a Flexure-based XY Positioning Stage with Balanced Axial Forces on Decoupling Modules

Design of a Flexure-based XY Positioning Stage with Balanced Axial Forces on Decoupling Modules

来源 :第6届纳米操纵、制造与测量国际会议( the International Conference IEEE 3M-NANO | 被引量 : 0次 | 上传用户：wangcwfq3

【作 者】

：

Zhen Zhang Zhiqing Liu Peng Yan 

【机 构】

：

Department of Mechanical Engineering,Tsinghua University,China

【出 处】

：

第6届纳米操纵、制造与测量国际会议( the International Conference IEEE 3M-NANO

【发表日期】

：

2016年5期

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