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采用溶胶-凝胶工艺制备了Fe3+掺杂的TiO2薄膜,研究了掺杂量对TiO2薄膜的晶相转变、晶粒大小、表面形貌、紫外及可见光吸收率以及光催化效率的影响。结果表明低浓度Fe3+掺杂可形成锐钛矿相与金红石相共存,而高浓度Fe3+掺杂TiO2薄膜为纯锐钛矿相,并且其衍射峰向高角度偏移。0.1%摩尔分数掺杂的薄膜具有最佳颗粒度和表面结构,其光吸收范围最大,光催化效率最高。
Fe3 + doped TiO2 thin films were prepared by sol-gel process. The effects of doping amount on the crystal phase transition, grain size, surface morphology, UV and visible light absorption and photocatalytic efficiency of TiO2 films were investigated. The results show that the low concentration of Fe3 + doping can form anatase phase and rutile phase coexist, while the high concentration of Fe3 + doping TiO2 film pure anatase phase, and the diffraction peak shifted to a high angle. The films with 0.1% molar fraction have the best particle size and surface structure with the largest light absorption range and the highest photocatalytic efficiency.