Phase structure control of TiNbN composite coatings prepared by pulsed bias arc ion plating

• 作 者: MinZhang[1]GuoqiangLin[2]ChuangDong[2]KwangHoKim[3]
• 机 构: National Core Research Center for Hybrid Materials Solution, Pusan National University,Busan 609-735
• 出 处: 9th Asia-Pacific Conference on Plasma Science and Technology
• 发表日期: 2008年期

　　Ternary TiNbN composite coatings were deposited on high-speed steel by pulsed bias arc ion plating.Substrate bias varied from-300V to-900V to investigate the bias effect on coating structure.Phase structure of the coatings was found to be quite sensitive to substrate bias value.At a bias of-300V, the coatings crystallized in solid solution (Ti, Nb)N phase with a NaCl structure.When the bias varied to600V, a mixture of TiN, Ti2N and fcc δ-NbN phases was observed in the coatings.At an even higher bias of-900V, TiN, fcc δ-NbN, Ti2N, and hcp Nb2N were formed in the coatings.The analysis shows that the phase formation is correlated with ion energies provided by different pulsed biases to satisfy the threshold values of formation enthalpy of various compounds.