Methods to Enhance Uniformities of Output Beams from Beam Expanding Unit for Excimer Laser Beam

• 作 者: ZhaoYang;WangPing;LiuChunlai;MenShudong;
• 机 构: State Key Laboratory of Applied Optics Changchun Institute of Optics,Fine Mechanics and Physics,Chin
• 出 处: 第十届全国激光技术与光电子学学术会议
• 发表日期: 2015年期

　　It is necessaryto expand the excimerlaser beam in one dimension to obtain symmetricalsquare distribution to meet the requirements of most illumination units.However,the Gaussian type distribution of the excimer laser caused poor uniformities after expanding.A kind of non-parallel reflective beam growing unit is proposed.