Effect of RF Negative Bias on the Structure and Performance of Diamond-like Carbon Films

• 作 者: SangLijun;ChenQiang;
• 机 构: Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, 102600, Beij
• 出 处: 9th Asia-Pacific Conference on Plasma Science and Technology
• 发表日期: 2008年期

　　Diamond-like carbon films were prepared on single crystal silicon under different RF negative biases by microwave electron cyclotron resonance plasma chemical vapor deposition.The microstructure and morphology were characterized by Fourier transformation infrared spectroscopy and atomic force microscopy, and the friction coefficient of films was also tested later.The result shows that the films were typical hydrogenated diamond-like carbon with a smooth and compact structure.With the increase of RF bias the peak intensity of C-H stretching vibration between 2800cm-1~3000cm-1 was increased at the beginning and then decreased, which caused the friction coefficient being smaller and then becoming larger.In 50W RF power it is noted that the peak intensity of C-H vibration and the friction coefficient reached the minimum.