Functional Films by Magnetron Sputtering Processes

• 作 者: PJKelly;
• 机 构: Surface Engineering Group,Manchester Metropolitan University,Chester Street,Manchester M1 5GD,UK
• 出 处: 2015 Shanghai Thin Film Conference(2015上海薄膜国际会议)
• 发表日期: 2015年期

　　Magnetron sputtering is a versatile technique for the production of high quality coatings and functional films for a wide range of applications.Furthermore,the process is readily scalable from the laboratory to industry.This paper will describe the production and characterization of a range of titanium-based functional films to demonstrate the flexibility of this technique.