Influence of ambient medium on femtosecond laser processing of silica

• 作 者: 曹小文 张振宇 孙思明 王剑楠 孙洪波 陈岐岱
• 机 构: 吉林大学电子学院
• 出 处: 第十届全国光子学学术会议
• 发表日期: 2016年4期
• 关键词: femtosecond laser water silica

　　Femtosecond laser pulses have proved to be an effective tool for micromachining hard materials,such as silica.In the drilling process,the size of hole depends on the numerical aperture(NA)of objective.The smaller hole can be obtained with larger NA.In general,the working distance of objective will decrease with the increase of NA.