The mechanical properties of graded and multilayer CrCrN films deposited by controlled arc ion plati

• 作 者: X.Liu M.E.Wang G.J.Ma G.Sun
• 机 构: ScienceandTechnologyonPowerBeamProcessesLaboratory,BeijingAeronauticalManufacturingTechnologyResearc
• 出 处: 2014国际高能束与特种能场制造暨第五届高能束流加工技术国际学术会议
• 发表日期: 2014年9期
• 关键词: Modulus CrN film Mechanical Properties

　　Graded CrN film and multilayer Cr/CrN films with different modulate periods were synthesized on bearing steels by controlled arc ion plating, and the influences of layer structure and modulus on mechanical properties of Cr/CrN films were investigated.The thickness and morphology of films were observed by scanning electronic microscope (SEM).Composition analysis of the films was carried out by energy dispersive spectroscopy (EDS) in SEM.Structure was investigated by X-ray diffraction (XRD).Mechanical properties were evaluated using nano-indentation and scratch tester.The results showed that the thickness of films with different structure and modulus was around 6 μm, main orientations of CrN (111) and (200) presented in Cr/CrN films.The mechanical properties including hardness, modulus, plasticity and adhesion were sensitive to the modulate periods and layer structure, and were obviously improved by the graded layer structure.All of the performances indicated that graded structure of CrN film results in improvement of mechanical properties.